Micro-Fabrication Techniques (EE/MT/PEP596)

Course Instructor
Henry Du

Discuss processing procedures involved in the fabrication of microelectronic devices and microelectromechanical systems (MEMS). Focus on IC fabrication topics. Become expert in crystal growth, epitaxy, silicon oxide growth, impurity doping, ion implantation, photo and electron beam lithography, etching, sputtering, thin film metallization, passivation and packaging. Learn how MEMS sensors and actuators are designed using different areas of engineering disciplines. Find out how these sensors and actuators are constructed using a microlithographically-based manufacturing process in conjunction with both semiconductor and micromachining microfabrication technologies.